본문 바로가기 주메뉴 바로가기

포토척/웨이퍼 테이블

home > 제품생산 > 포토척/웨이퍼 테이블
ASML Canon Nikon Remarks
5500/100 FPA3000IW G4D Available materials for ASML are
sintered SiC, DLC coated SiC,
CVD SiC & Quartz.
5500/200 FPA2500I2 G6D
5500/300 FPA3000I4 I9C/10C/11D/12D
5500/400 FPA3000I5 I14D/EX14
5500/500 FPA3000EX3 SF-100  
5500/700 FPA3000EX4 SF-110/120  
5500/800 FPA3000EX5 SF-130/140  
5500/850 FPA3000EX6 S101A  
5500/1100 FPA5500IZ+ S201A  
5500/1200 FPA5000ES2 S203/204  
5500/1250 FPA5000ES2+ S205/206D  
TWINSCAN XT:1000H FPA5000ES3 SF-150  
TWINSCAN XT:1450G FPA5000ES4    
*TWINSCAN XT:1700Fi FPA6000ES5   * Serviced only refurbishment
* TWINSCAN XT:1900Gi FPA6000ES6    
* TWINSCAN XT:1950Hi FPA6000AS4    
* TWINSCAN NXT:1970i FPA6000AS5    
* TWINSCAN NXT:1980i