포토척/웨이퍼 테이블
> 제품생산 > 포토척/웨이퍼 테이블| ASML | Canon | Nikon | Remarks |
|---|---|---|---|
| 5500/100 | FPA3000IW | G4D | Available materials for ASML are sintered SiC, DLC coated SiC, CVD SiC & Quartz. |
| 5500/200 | FPA2500I2 | G6D | |
| 5500/300 | FPA3000I4 | I9C/10C/11D/12D | |
| 5500/400 | FPA3000I5 | I14D/EX14 | |
| 5500/500 | FPA3000EX3 | SF-100 | |
| 5500/700 | FPA3000EX4 | SF-110/120 | |
| 5500/800 | FPA3000EX5 | SF-130/140 | |
| 5500/850 | FPA3000EX6 | S101A | |
| 5500/1100 | FPA5500IZ+ | S201A | |
| 5500/1200 | FPA5000ES2 | S203/204 | |
| 5500/1250 | FPA5000ES2+ | S205/206D | |
| TWINSCAN XT:1000H | FPA5000ES3 | SF-150 | |
| TWINSCAN XT:1450G | FPA5000ES4 | ||
| *TWINSCAN XT:1700Fi | FPA6000ES5 | * Serviced only refurbishment | |
| * TWINSCAN XT:1900Gi | FPA6000ES6 | ||
| * TWINSCAN XT:1950Hi | FPA6000AS4 | ||
| * TWINSCAN NXT:1970i | FPA6000AS5 | ||
| * TWINSCAN NXT:1980i |
