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Business Items

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ITEM Group Process Materials
Photo Chucks/Wafer Tables Lithography for ASML, Canon, Nikon SiC, Quartz
Vacuum Chucks Wafer Inspection,
Wafer Stage Components,
Clamping Substrate for Semi/LED,
Others		 SiC, Porous Ceramic,
Black Ceramics, Al
Ceramic Components In Common Usages in Semi/LED/Display Al2O3, Y2O3, AlN, Si3N4, SiC, etc
Spare Parts Refurbishment Etch/Implant/CVD/PVD/Diffusion,
Others		 ESC, Heater, Si,
AMAT Showerheads,
Polishing Services Ultra precise Flatness 0.05um,
Surface Roughness Ra 0.01um,
Maximum available Φ700mm
Customized Improvement New Material Sourcing /Developments,
Design Modification